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CF Flanges

Product Name: CF Vacuum Flanges Series

The CF flanges are used for ultra-high vacuum applications; there are ConFlat (CF) flanges that use a copper

gasket and knife-edge flange to achieve the vacuum seal. The CF flange have tapped or bolt hole types. They

are used for foreline vacuum plumbing and for simple high vacuum (HV) chamber ports. CF (ConFlat) flanges

are the vacuum industry standard for ultra-high vacuum applications.


-Material: 304 S.S. ,316S.S.

-Size: CF16 ~ CF250

-Temperature range: 150°C (Viton) / -200°C ~450°C (Copper)

-Vacuum Rate: 10-13 torr

-Gaskets: OFHC Copper or Viton

-Torque Rating:CF35 and smaller 220 kgf-cm
                        CF63 and larger 360 kgf-cm



Custom modifications, welding and fabrication, flange types and sizes are available on request.

CF Blank Flanges,Fixed(Tapped and Through Holes)
Blank Flanges FixedCF Blank Flanges,Fixed
Flange Size A B H P.C.D Thru Holes F Tapped F Bolt Holes
CF1.33"/CF16 21.4 34 7.3 27 Ø4.3
 8-32 6
CF2.12"/CF25 35 54 10.5 43 Ø6.6 1/4-28 6
CF2.75"/CF35 48.3 70 13 58.7 Ø6.6 1/4-28 6
CF3.38"/CF50 61.6 86 16 72.4 Ø8.4 5/16-24 8
CF4.50"/CF63 82.5 114 17.5 92.2 Ø8.4 5/16-24 8
CF6.00"/CF100 120.6 152 20 130.3 Ø8.4 5/16-24 16
CF8.00"/CF150 171.4 202 22 181 Ø8.4 5/16-24 20
CF10.00"/CF200 222.2 253 24.5 231.8 Ø8.4 5/16-24 24
CF12.00"/CF250 278.1 305 26 284 Ø8.4 3/8-24 32
CF Rotatable Blank Flanges(Tapped and Through Holes)
CF Rotatable Blank FlangesCF Rotatable Blank Flanges
Flange Size A B C H P.C.D Thru Holes F Tapped F Bolt Holes
CF1.33"/CF16 21.4 34 18.5 7.3 27 Ø4.3 8-32 6
CF2.12"/CF25 35 54 29 10.5 43 Ø6.6 1/4-28 6
CF2.75"/CF35 48.3 70 39 13 58.7 Ø6.6 1/4-28 6
CF3.38"/CF50 61.6 86 56 16 72.4 Ø8.4 5/16-24 8
CF4.50"/CF63 82.5 114 71 17.5 92.2 Ø8.4 5/16-24 8
CF6.00"/CF100 120.6 152 109 20 130.3 Ø8.4 5/16-24 16
CF8.00"/CF150 171.4 202 160 22 181 Ø8.4 5/16-24 20
CF10.00"/CF200 222.2 253 208 24.5 231.8 Ø8.4 5/16-24 24
CF12.00"/CF250 278.1 305 262 26 284 Ø8.4 3/8-24 32
CF Bored Rotatable Flanges(Tapped and Through Holes)
CF Bored Rotatable FlangesCF Bored Rotatable Flanges
Flange Size A B C H P.C.D Thru Holes F Tapped F Bolt Holes
CF1.33"/CF16 21.4 34 18.5 7.3 27 Ø4.3 8-32 6
CF2.12"/CF25 35 54 29 10.5 43 Ø6.6 1/4-28 6
CF2.75"/CF35 48.3 70 39 13 58.7 Ø6.6 1/4-28 6
CF3.38"/CF50 61.6 86 56 16 72.4 Ø8.4 5/16-24 8
CF4.50"/CF63 82.5 114 71 17.5 92.2 Ø8.4 5/16-24 8
CF6.00"/CF100 120.6 152 109 20 130.3 Ø8.4 5/16-24 16
CF8.00"/CF150 171.4 202 160 22 181 Ø8.4 5/16-24 20
CF10.00"/CF200 222.2 253 208 24.5 231.8 Ø8.4 5/16-24 24
CF12.00"/CF250 278.1 305 262 26 284 Ø8.4 3/8-24 32
CF Bored Flanges,Fixed(Tapped and Through Holes)
CF Bored Flanges,FixedCF Bored Flanges,Fixed
Flange Size A B C H P.C.D Thru Holes F Tapped F Bolt Holes
CF1.33"/CF16 21.4 34 18.5 7.3 27 Ø4.3 8-32 6
CF2.12"/CF25 35 54 29 10.5 43 Ø6.6 1/4-28 6
CF2.75"/CF35 48.3 70 39 13 58.7 Ø6.6 1/4-28 6
CF3.38"/CF50 61.6 86 56 16 72.4 Ø8.4 5/16-24 8
CF4.50"/CF63 82.5 114 71 17.5 92.2 Ø8.4 5/16-24 8
CF6.00"/CF100 120.6 152 109 20 130.3 Ø8.4 5/16-24 16
CF8.00"/CF150 171.4 202 160 22 181 Ø8.4 5/16-24 20
CF10.00"/CF200 222.2 253 208 24.5 231.8 Ø8.4 5/16-24 24
CF12.00"/CF250 278.1 305 262 26 284 Ø8.4 3/8-24 32
CF Fitting-Elbow,Tee,Cross,Bellows

Product Name: CF Vacuum Fitting-Elbow,Tee,Cross,Bellows

We manufacture vacuum CF pipe fittings for high vacuum (HV) system from 304 series stainless steel.

They are ideal for use as roughing lines on semiconductor process equipment and for simple HV chamber

ports and pump exhaust lines in semiconductor. Yoyond designed to fit standard and customize to your

specifications.


- Material: Stainless Steel 304. or 316

- Maximum cleanliness for HV applications to > 10-8Torr

- Temperature range from -20 °C to 150 °C

- Size: CF16 through CF150 (Other sizes available upon request)



Larger or special size available upon request, contact us with your specific requirements.

CF 90° Adapters Elbow(Fixed and Rotatable)
CF_Flanges_ElbowCF_Flanges_Elbow
Size A DN Tube size Material
CF1.33"/CF16 40 16 19.05*1.65 304S.S/316S.S
CF2.75"/CF35 65 35 38.1*1.65 304S.S/316S.S
CF3.38"/CF50 88 50 50.8*1.65 304S.S/316S.S
CF4.50"/CF63 88 63 63.5*1.65 304S.S/316S.S
CF6.00"/CF100 108 100 101.6*1.65 304S.S/316S.S
CF8.00"/CF150 138 150 152.4*1.65 304S.S/316S.S
CF10.00"/CF200 208 200 203.2*1.65 304S.S/316S.S
CF Adapters Tee(Fixed and Rotatable)
CF_Flanges_TeeCF_Flanges_Tee
Size A B DN Tube size Material
CF1.33"/CF16 40 80 16 19.05*1.65 304S.S/316S.S
CF2.75"/CF35 65 130 35 38.1*1.65 304S.S/316S.S
CF3.38"/CF50 88 176 50 50.8*1.65 304S.S/316S.S
CF4.50"/CF63 88 176 63 63.5*1.65 304S.S/316S.S
CF6.00"/CF100 108 216 100 101.6*1.65 304S.S/316S.S
CF8.00"/CF150 138 276 150 152.4*1.65 304S.S/316S.S
CF10.00"/CF200 208 416 200 203.2*1.65 304S.S/316S.S
CF Adapters Cross(Fixed and Rotatable)
CF_Flanges_CrossCF_Flanges_Cross
Size A B DN Tube size Material
CF1.33"/CF16 40 80 16 19.05*1.65 304S.S/316S.S
CF2.75"/CF35 65 130 35 38.1*1.65 304S.S/316S.S
CF3.38"/CF50 88 176 50 50.8*1.65 304S.S/316S.S
CF4.50"/CF63 88 176 63 63.5*1.65 304S.S/316S.S
CF6.00"/CF100 108 216 100 101.6*1.65 304S.S/316S.S
CF8.00"/CF150 138 276 150 152.4*1.65 304S.S/316S.S
CF10.00"/CF200 208 416 200 203.2*1.65 304S.S/316S.S
CF Nipple Adapters (Fixed and Rotatable)
CF-Nipple-AdaptersCF-Nipple-Adapters
Size DN D d Material
CF1.33"/CF16 16 18 16 304S.S/316S.S
CF2.75"/CF35 35 38 35 304S.S/316S.S
CF3.38"/CF50 50 53 50 304S.S/316S.S
CF4.50"/CF63 63 66 63 304S.S/316S.S
CF6.00"/CF100 100 104 100 304S.S/316S.S
CF8.00"/CF150 150 154 150 304S.S/316S.S
CF10.00"/CF200 200 205 200 304S.S/316S.S
CF Bellows(Fixed and Rotatable)
CF_Flanges_BellowsCF_Flanges_Bellows
Size L DN Material
CF1.33"/CF16 Specified by the customer
Common Specifications:250,500,750,1000		 16 304S.S
CF2.12"/CF25 25 304S.S
CF2.75"/CF35 35 304S.S
CF3.38"/CF50 50 304S.S
CF4.50"/CF63 63 304S.S
CF6.00"/CF100 100 304S.S
CF8.00"/CF160 160 304S.S
CF Accessories

Product Name: Copper Gasket



These CF copper gaskets fit a CF flange. The copper gaskets are designed for use in high end UHV applications

where total performance is required. These vacuum fittings use a copper gasket and knife-edge flanges to

achieve the high vacuum seal. The copper gasket are offered the vacuum industry standard for ultra-high

vacuum applications.


-Size: CF16 ~ CF250

-Material : Copper or Viton

CF Copper Gasket
CF Copper GasketCF Copper Gasket
Size A B H Material
CF1.33"/CF16 21.4 16 2 copper
CF2.12"/CF25 35 25 2 copper
CF2.75"/CF35 48.3 38.3 2 copper
CF3.38"/CF50 61.6 51.6 2 copper
CF4.50"/CF63 82.5 72.5 2 copper
CF6.00"/CF100 120.6 108.6 2 copper
CF8.00"/CF150 171.4 159.4 2 copper
CF10.00"/CF200 222.2 210.2 2 copper
CF12.00"/CF250 273.1 261.1 2 copper


Product Name: Plate Nut



The Plate nuts are metal plates with 2-threaded holes, shaped to match the corresponding CF flange's bolt

hole patterns and replace the individual nuts. The plate nut’s major advantage is, once two bolts are manually

started, the plate nut acts as its own backing wrench and washer—the bolts are tightened using one wrench.

The plate nuts are perfect for those hard to reach(and see)spaces that are encountered during system

assembly and service.

-Size: CF16 ~ CF63

-Material : 304 S.S.

CF Plate Nut
CF Plate NutCF_Plate_Nut
Size A B C ΦD
CF1.33"/CF16 19.5 13.5 4 M4
CF2.75"/CF35 39.5 29.5 6 M6
CF4.50"/CF63 50.2 35.2 8 M8